Malema CMFC-5032-F3306-22-NH-001 Sensor

Malema CMFC-5032-F3306-22-NH-001 Sensor

 Introduction

The Malema CMFC-5032-F3306-22-NH-001 sensor is a CMFC5000 series Coriolis liquid mass flow controller specifically designed for semiconductor high-purity liquid pipelines, capable of real-time measurement and control of chemical liquid flow.

Product Features

1. Coriolis principle, measurement is not affected by changes in liquid viscosity or temperature

2. The liquid receiving part is made of PFA material, which is resistant to strong corrosive chemicals and will not precipitate particles

3. Allow fluid to carry bubbles, and a small amount of bubbles can still be stably measured

4. Built in regulating valve closed-loop regulation, quick flow locking set value

5. Equipped with a built-in flow over limit alarm, it can promptly report any liquid breakage or leakage to the machine

6. Non rotating impeller structure, less likely to be stuck by CMP slurry particles

7. Digital communication output, convenient for docking with the main control of the machine to read real-time traffic

8. Small integrated module, easy to install and replace during pipeline renovation

9. Good measurement repeatability, stable and consistent supply of each batch of medicinal solution

10. Internal circuits should be isolated and protected to resist electromagnetic interference in the workshop

Application Areas

1. Supply pipeline for semiconductor wet cleaning solution

2. CMP chemical mechanical polishing slurry conveying system

3. Wet etching high-purity chemical proportioning unit

4. Wafer surface treatment drug distribution module

5. Precise liquid feeding system for semiconductor wet process technology

Malema CMFC-5032-F3306-22-NH-001 sensor is resistant to bubbles and corrosion, with precise control of liquid flow rate. It is the core component for fluid control in semiconductor wet process.

Product imag

ontroller Module

 5SHY4045L0004 Thyristor module
 AO2000 LS25 controller module
 CS513K01 3BSE004772R1 controller module

Other website links

HIMA H4135 992413502 电源控制处理器
FOXBORO FBMSVH 电子控制模块
 UAC389AE02 HIEE300888R0002 变频接口板模块