Heidenhain 591151-01-00-A chip stage chuck

Heidenhain 591151-01-00-A chip stage chuck

 Introduction

Heidenhain 591151-01-00-A wafer table chuck, Heidenhain semiconductor wafer platform adsorption chuck, used for vacuum fixing wafers and high-precision angle measurement.

Product Features

1. Vacuum adsorption is uniform, the entire wafer is attached smoothly, and there will be no local warping

2. The disk has high cleanliness and is not prone to particle contamination on the wafer surface

3. Integrated precision grating detection, real-time feedback of chip table rotation angle

4. The vacuum circuit comes with built-in monitoring, which can quickly identify and alarm for gas leaks

5. The disc material is wear-resistant, and it is not easy to scratch the back of the wafer when repeatedly taken and placed

6. Strong rigidity, minimal deformation during high-speed rotation, ensuring process accuracy

7. Adapt to the temperature control system of the machine, ensuring uniform and stable heat conduction

8. Anti cavity plasma corrosion, longer service life in etching environment

9. Precise positioning reference, no need for extensive recalibration after disassembly and replacement

10. The layout of the vacuum channel is reasonable, and the response of pumping and discharging is fast

Application Areas

1. Semiconductor lithography equipment wafer carrying station

2. Etching machine chip rotating worktable

3. Thin film measurement and testing platform

4. High precision wafer measurement and testing equipment

5. Vacuum process chamber wafer carrier unit

Heidenhain 591151-01-00-A chip stage chuck has stable vacuum adsorption and comes with precise position feedback, making it the core load-bearing spare part for semiconductor high-precision process stages

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