ENI OEM-6A-11491-51 Solid State Generator

ENI OEM-6A-11491-51 Solid State Generator

 Introduction

ENI OEM-6A-11491-51 solid-state generator, MKS's ENI solid-state RF power supply, used to excite cavity plasma and adapt to various semiconductor process cavities.

Product Features

1. Solid state circuit architecture, without vacuum tubes, can quickly ignite plasma when turned on

2. Good linearity of power output, precise energy control even with small adjustments

3. Real time monitoring of forward and reflected power. If the reflection exceeds the standard, the power will be immediately reduced for protection

4. Water cooling and heat dissipation design, with controllable temperature rise during long-term operation at full power

5. The RF waveform distortion is small, which can reduce the occurrence of process defects on the wafer surface

6. Support external analog signal control, convenient for remote power adjustment by the upper computer of the machine

7. The circuit is resistant to load fluctuations, and the power is less likely to drift when the cavity state changes

8. Rack mounted standard size, cabinet can be directly placed, easy to replace

9. Equipped with a running status indicator light, the fault type is intuitive and easy to determine

10. Redundant design of internal components, longer continuous operation life of production line

Application Areas

1. Semiconductor PECVD thin film deposition chamber

2. Plasma dry etching equipment

3. Wafer plasma cleaning process machine

4. Optical thin film vacuum coating equipment

5. Experimental apparatus for plasma modification of material surface

The ENI OEM-6A-11491-51 solid-state generator has stable ignition and delicate power regulation, and is a commonly used RF power supply spare part in semiconductor plasma processes.

Product imag

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