Powerex SF120872PH Clean Air Compressor

Powerex SF120872PH Clean Air Compressor

 Introduction

Powerex SF120872PH clean air compressor, oil-free vortex air compressor, specifically designed to supply high-purity compressed air to semiconductor dust-free workshops.

Product Features

1. Oil free vortex structure, outputting air without oil content, will not pollute the wafer

2. The operation vibration is minimal and will not interfere with the stable process of surrounding precision machines

3. Low noise, suitable for use inside clean workshops

4. Stable pressure output and minimal fluctuations in gas supply flow rate

5. Equipped with high temperature and overload protection, automatic shutdown under abnormal working conditions

6. There are few moving parts, and the daily maintenance workload is not large

7. Strong continuous full load operation capability, supporting all-weather gas supply for production lines

8. Built in pressure monitoring, real-time feedback on gas supply status

9. The air filtration system is well-equipped, with good dust and impurity retention effect

10. The whole machine has a compact structure and occupies a small space in the computer room

Application Areas

1. Gas supply for semiconductor EFEM front-end pneumatic actuator

2. Pneumatic valve air source for wafer cleaning equipment

3. Pneumatic transmission unit for etching and deposition machines

4. Clean laboratory process gas supply

5. Pneumatic drive system for semiconductor automation equipment

The Powerex SF120872PH clean air compressor produces high-purity oil-free compressed air with stable supply, and is the core gas source equipment for the pneumatic system of semiconductor production lines.

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