Nikon 4S065-959-1 amplifier module
Introduction
The Nikon 4S065-959-1 amplifier module is a driver board for the Nikon NSR lithography machine SPA373C, responsible for amplifying displacement signals.
Product Features
High signal amplification accuracy ensures the positioning control of the wafer stage.
Equipped with signal noise reduction to resist internal electromagnetic interference of the machine.
The board technology is solid, and the clean workshop operates stably for a long time.
Standard slot installation, easy and convenient maintenance and replacement.
Built in anomaly detection to quickly identify signal faults.
Product Specifications
Model 4S065-959-1, SPA373C board.
Compatible with NSR series lithography machines.
Processing weak signals from precision displacement sensors.
Low voltage DC onboard power supply.
The original factory matching interface is directly plugged in.
Application Areas
Nikon NSR lithography machine stage signal amplification.
Precision servo displacement system for lithography equipment.
Crystal cone motion control signal processing.
Repair and replacement of old lithography machine spare parts.
Signal conditioning for high-precision optical positioning equipment.
This amplifier module amplifies the weak signal of the sensor and is a key spare part for precise positioning of the lithography machine worktable
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