AMAT 0190-31155 Digital Motor Controller

AMAT 0190-31155 Digital Motor Controller 

 Introduction

The AMAT 0190-31155 digital motor controller is a motion drive board for application material machines, which controls the internal motor positioning actions of the machine.

Product Features

High precision in motion positioning ensures smooth wafer transfer operation.

Equipped with overload protection, it promptly stops outputting when the motor is stuck.

Strong anti-interference ability, suitable for cavity RF environment.

Standard slot installation, easy and fast maintenance and replacement.

Real time feedback of motor position for easy and rapid troubleshooting.

Product Specifications

Model 0190-31155 digital motor controller.

Compatible with AMAT semiconductor process machines.

DC low-voltage power supply drives the motor.

Receive encoder position feedback signal.

Communicate and interact with the main control bus of the machine.

Application Areas

Semiconductor machine table crystal circle transmission motor drive.

Motion control of cavity baffle and lifting mechanism.

Maintenance and replacement of spare parts for AMAT old machine movement.

Precision displacement mechanism inside the vacuum chamber.

Wafer loading and unloading robot servo control.

This controller is a core spare part for machine motion execution, ensuring stable operation of wafer handling and cavity component movement

Product imag

ontroller Module

EPRO PR6423/000-000 front sensor
 RK682011-BA RL0B 100 Pulse output module
 SNAT602TAC 61001395G1 Control card

Other website links

DSSB-01C整流控制主板
DSDX180A 电源模块
DSTDW150 主数字输出模块