Varian D-H0121001 Pneumatic Rack PCB
Introduction
The Varian D-H0121001 pneumatic rack PCB is the pneumatic control board for Varian semiconductor equipment, which controls the operation of air valves and vacuum pipelines.
Product Features
Stable acquisition of pneumatic signals and good synchronization of valve opening and closing actions.
The board is equipped with signal isolation to resist electromagnetic interference in the workshop.
Onboard multi-channel drive circuit, capable of simultaneously controlling multiple groups of solenoid valves.
Original factory standard slot, easy to replace and disassemble on site.
Durable clean workshop environment, stable long-term continuous operation.
Product Specifications
Model D-H0121001 Pneumatic Rack PCB.
Compatible with Varian ion implantation machine.
24V DC power input.
Multi channel digital output drives solenoid valve.
Collect pressure and valve feedback signals.
Application Areas
Varian ion implantation machine pneumatic circuit control.
Vacuum pipeline solenoid valve start stop scheduling.
Collection of chamber air pressure interlock protection signals.
Replacement of old Varian machine maintenance spare parts.
Semiconductor ion process equipment gas control unit.
This PCB is responsible for the signal transmission and reception of the machine's air circuit, and is the core spare part of the gas control part of the ion implantation equipment
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| 6AV30101DK00 | 6DD1681-0BF1 | TRICONEX 3700 |
| 6415-001-N-N-N | 6DD1681-0BD1 | TRICONEX 3700A |
| 6415-001-N-N-K | 6DD1681-0AJ2 | TRICONEX 3701 |
| 6415-001-N-H-K | 6DD1681-0AJ1 | TRICONEX 3703E |
| 6415-001-G-N-K | 6DD1681-0AJ0 | TRICONEX 3604E |
| 6415-001-C-N-N | 6DD1681-0AH2 | TRICONEX 3636R |
| 6415-001-C-N-K | 6DD1681-0AH1 | TRICONEX 3501E |