Comet Technologies 832-242736-002 RF Matching Network Module

Comet Technologies 832-242736-002 RF Matching Network Module 

 Introduction

Comet Technologies 832-242736-002 RF matching network module is an impedance matching spare part for LAM etching machines, which is commonly used in plasma processes.

Product Features

Fast tuning response, able to quickly follow changes in cavity load.

Effectively reduce reflected power and protect the RF generator.

Built in arc protection to reduce damage caused by chamber ignition.

Rack mounted installation, easy on-site replacement and maintenance.

Durable clean workshop conditions, stable and continuous operation for a long time.

Product Specifications

Model 832-242736-002 RF matching network.

Compatible with LAM semiconductor etching machine.

13.56MHz standard RF operating frequency.

Built in adjustable vacuum capacitor and sensing circuit.

Support machine communication feedback matching status.

Application Areas

Semiconductor etching cavity RF impedance matching.

Power regulation of wafer plasma process.

Repair and replacement of spare parts for LAM old machines.

Supporting equipment for vacuum plasma cleaning.

RF circuit for thin film deposition chamber.

This matching network is the core RF spare part of LAM machine, used to stabilize plasma and ensure process consistency

Product imag

ontroller Module

SST SST-PB3-CLX-RLL Communication module
 07KT98 GJR5253100R427807KT98 H3 module
BENTLY 330100-90-00 Monitor module

Other website links

MOTOROLA MVME55006E-0163R PC处理器
DSAO120A模拟输出模块
BC810K01 以太网通讯