AE 3155999-258 RF Matcher

AE 3155999-258 RF Matcher 

 Introduction

AE 3155999-258 RF Matcher is an impedance matching unit used in AMAT machines to stabilize RF transmission.

Product Features

Fast tuning response, quickly offsetting load changes.

It can reduce the reflected power and protect the front-end RF power supply.

Equipped with arc detection, timely protection in case of abnormalities.

Rack mounted structure, easy to disassemble and replace on site.

Suitable for clean workshops, stable long-term continuous operation.

Product Specifications

Model 3155999-258 RF Matcher.

Compatible with AMAT semiconductor process chambers.

13.56MHz RF operating frequency.

Built in motor driven adjustable capacitor.

Support machine communication feedback matching status.

Application Areas

Semiconductor etching cavity RF impedance matching.

PVD thin film deposition process power matching.

Repair and replacement of spare parts for old AMAT machines.

Plasma chamber cleaning equipment.

RF circuit matching for wafer coating equipment.

This matching device is a commonly used RF spare part for AMAT machines, which stabilizes the plasma when the cavity process fluctuates.

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