ADTEC 27-307431-00 Plasma Generator Module

ADTEC 27-307431-00 Plasma Generator Module 

 Introduction

ADTEC 27-307431-00 plasma generator module is a semiconductor machine matching RF power supply with good process stability.

Product Features

Stable power output ensures consistent plasma state.

Rapid suppression of electric arc, reducing damage caused by chamber ignition.

Strong anti reflective load capacity and adaptability to process fluctuations.

Rack installation, easy and quick replacement of spare parts.

Equipped with status monitoring, convenient for quick troubleshooting.

Product Specifications

Model 27-307431-00 RF generator.

Suitable for semiconductor thin film processing machines.

High frequency RF power output.

Built in power and reflection signal acquisition.

Original factory standard communication interface docking machine.

Application Areas

Power supply for semiconductor thin film deposition process.

Plasma excitation in wafer etching chamber.

Replacement of power spare parts for old semiconductor equipment.

Vacuum plasma surface treatment equipment.

RF power supply unit for precision coating machine.

This plasma generator is a commonly used spare part for Japanese semiconductor equipment, with a high demand for maintenance and replacement.

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