SMC XLA-80-X741 high vacuum angle valve

SMC XLA-80-X741 high vacuum angle valve 

 Introduction

SMC XLA-80-X741 high vacuum angle valve

Product Features:

1. The corrugated tube sealing structure has an extremely low leakage rate, ensuring high vacuum sealing of the chamber and preventing the infiltration of external gases

2. Hard anodized aluminum valve body, resistant to fluorine gas corrosion, low gas release, reducing heavy metal pollution to wafers

3. Single acting normally closed pneumatic drive, with smooth action response, can be matched with machine vacuum pipeline for fast on-off control

4. Large flow guide design, high pumping efficiency, shortened cavity vacuum pumping time, and improved production line rhythm

5. The corrugated pipe components can be replaced separately, with low maintenance costs and convenient on-site disassembly and assembly of standard flange interfaces

Product Parameters:

1. Material model: XLA-80-X741

2. Valve diameter: DN80

3. Drive mode: Pneumatic single acting normally closed

4. Pressure range: 1 × 10 ⁻⁶ Pa to atmospheric pressure

5. Sealing structure: 316L stainless steel corrugated pipe+FKM seal

Application fields:

1. Vacuum pipeline on/off control of semiconductor etching machine

2. High vacuum isolation of PVD/CVD chamber for thin film deposition

3. Front end pipeline cutoff protection of vacuum molecular pump

4. Process inert gas vacuum conveying pipeline switch

5. Replacement and maintenance of spare parts for high vacuum angle valves in semiconductor vacuum systems

This SMC XLA-80-X741 high vacuum angle valve is a critical isolation component for vacuum pipelines, used to connect and disconnect the air path between the vacuum chamber and the pump group, maintaining a high vacuum environment in the chamber

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