TMP EI-R04MT Turbomolecular Pump Controller

TMP EI-R04MT Turbomolecular Pump Controller 

 Introduction

Shimadzu EI-R04MT Turbomolecular Pump Controller

Product Features:

1. Vector frequency conversion drive, smooth control of magnetic levitation turbo pump acceleration and braking, reducing rotor impact losses

2. Integrated pump body temperature control function, supporting constant temperature setting of pump casing, suitable for long-term semiconductor vacuum process conditions

3. Built in complete fault diagnosis, automatic shutdown protection for overcurrent, overheating, and stall abnormalities, to avoid damage to the pump body

4. Comes with local panel operation and remote contact control, RS232 serial port can upload speed, temperature, and alarm information

5. Standard wiring port, easy to disassemble and replace on site, compatible with Shimadzu TMP-LM series magnetic levitation molecular pump without changing the wiring

Product Parameters:

1. Material model: EI-R04MT

2. Input power supply: single-phase AC 200~240V, maximum 2.0kVA

3. Communication interface: RS232C serial port, external contact I/O

4. Protection type: overcurrent, overheating, stall, temperature warning protection

5. Compatible pump types: Shimadzu TMP-803LM, 1003LM, 1303LM, 1503LM series magnetic levitation turbo molecular pumps

Application fields:

1. Semiconductor etching cavity magnetic levitation turbo pump drive and constant temperature control

2. Operation monitoring of PVD/CVD high vacuum chamber pump group for thin film deposition

3. Ion implantation equipment vacuum system molecular pump start stop and speed control

4. High vacuum chamber molecular pump matching driver for vacuum analysis instruments

5. Replacement and maintenance of spare parts for Shimadzu magnetic levitation TMP molecular pump controller

This Shimadzu EI-R04MT turbo molecular pump controller is a specialized drive unit for magnetic levitation molecular pumps, which balances speed regulation and pump body temperature management to ensure stable vacuum in the chamber. By checking the model, it can be quickly replaced on the machine.

Product imag

ontroller Module

 CI627A 3BSC980006R213 processor module
HP HOI-653A Robot module
YOKOGAWA SCP451-11 CPU module

Other website links

57310001-MP 数字量扩展模块
5751017-F 输入输出模块
LDSYN-101 模拟量输入输出模块