EDWARDS PT59-Z00-Z00 Turbine Controller

EDWARDS PT59-Z00-Z00 Turbine Controller 

 Introduction

EDWARDS PT59-Z00-Z00 Turbine Controller

Product Features:

1. Real time control of turbo molecular pump speed, smooth completion of pump start stop and acceleration, and reduction of rotor impact

2. Built in multi-dimensional fault protection, triggering shutdown protection for rotor in case of overcurrent, overheating, or abnormal pump body

3. Support real-time uploading of operating data such as speed and temperature to the machine, facilitating the monitoring of vacuum status on the production line

4. The metal casing is resistant to electromagnetic interference and suitable for stable operation in complex electromagnetic environments in semiconductor workshops

5. Standard interface design, easy on-site replacement, supporting STP series turbo pumps without changing the original circuit

Product Parameters:

1. Material model: PT59-Z0-Z00 (SCU-1500)

2. Compatible pump type: Edwards STP series turbo molecular pump

3. Input power supply: single-phase AC power supply

4. Communication interface: RS232 serial communication

5. Function: Speed closed-loop control, status monitoring, fault alarm

Application fields:

1. Drive and operation control of semiconductor etching cavity turbo molecular pump

2. High vacuum system pump group control for thin film deposition PVD/CVD equipment

3. Start stop management of vacuum chamber turbo pump for wafer dry cleaning

4. Vacuum detection equipment molecular pump speed and status monitoring

5. Replacement and maintenance of spare parts for Edwards STP turbo pump matching controller

This EDWARDS PT59-Z00-Z00 turbine controller is the driving control unit of the STP molecular pump, responsible for stabilizing and regulating the pump body speed, maintaining stable chamber vacuum, and can be directly replaced by checking the model.

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