Varian 9699461S002 Turbopump Controller

Varian 9699461S002 Turbopump Controller 

 Introduction

Varian 9699461S002 Turbopump Controller

Product Features:

1. Adopting a variable frequency drive scheme to smoothly control the start stop and speed increase of the turbo pump, reducing rotor impact wear

2. Built in complete fault diagnosis logic, automatic shutdown protection for pump body in case of overheating, overcurrent, stall and other abnormalities

3. Support local panel operation and remote control from the upper computer, real-time reading of speed and current operation data

4. Metal shielding shell, resistant to workshop electromagnetic interference, stable operation under long-term continuous vacuum conditions

5. Standardized wiring ports, easy to replace and disassemble on site, compatible with Varian Turbo-V series turbo pumps without changing wiring

Product Parameters:

1. Material model: 9699461S002

2. Power input: single-phase 100-240V AC

3. Communication interface: RS232 serial port

4. Protection type: overcurrent, overheating, stall protection

5. Compatible pump type: Varian Turbo-V series turbo molecular pump

Application fields:

1. Drive control of vacuum turbine pump for semiconductor ion implantation machine

2. Operation control of high vacuum chamber pump group in thin film deposition equipment

3. Speed monitoring of vacuum system in wafer dry etching chamber

4. Analyze the start stop management of vacuum molecular pumps for testing equipment

5. Replacement and maintenance of spare parts for Varian turbo molecular pump matching controller

This Varian 9699461S002 turbopump controller is a dedicated drive unit for Turbo-V molecular pumps, which stably controls the pump body speed, ensures the vacuum degree of the chamber, and can be directly replaced by checking the model.

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