Genius X6045500 current integrator component

Genius X6045500 current integrator component 

 Introduction

Genius X6045500 current integrator component

Product Features:

1. High precision charge integration acquisition, accurately capturing plasma pulse current signals with small reading errors

2. Built in anti-interference filtering circuit, capable of resisting electromagnetic interference from RF cavities, with strong signal stability

3. Modular board structure, easy to plug and replace on site, no need to modify the original machine wiring

4. Wide pulse signal adaptation range, capable of long-term continuous operation, suitable for semiconductor production conditions

5. Equipped with a signal verification circuit, it provides feedback on signal deviation in case of abnormalities, facilitating early troubleshooting

Product Parameters:

1. Material model: X6045500

2. Signal type: pulse current/charge integration acquisition

3. Power supply specification: ± 15V DC power supply

4. Signal output: Analog voltage signal

5. Compatible equipment: Genius plasma RF power supply supporting machine

Application fields:

1. Monitoring of plasma current in semiconductor etching chamber

2. RF discharge charge integration detection for thin film deposition equipment

3. Energy closed-loop feedback control of plasma process

4. Real time acquisition of plasma state in wafer dry process technology

5. Replacement of spare parts for RF power supply and renovation of signal acquisition system

This Genius X6045500 current integrator component is the signal acquisition core of RF plasma equipment, used to calculate the total amount of plasma charge, ensure the repeatability of semiconductor processes, and replace spare parts by checking the model for quick machine operation.

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