Komatsu RX-610-T1-R Chemical Cycle Controller

Komatsu RX-610-T1-R Chemical Cycle Controller 

 Introduction

#Komatsu RX-610-T1-R Chemical Cycle Controller

Product Features:

1. Equipped with PID automatic temperature control algorithm, the temperature control accuracy of the medicine is high, and the fluctuation is very small

2. Equipped with fault self diagnosis function, it triggers an alarm and cuts off the output when abnormal, protecting the pipeline cavity

3. Supports RS232 communication interface, which can be connected to the upper computer of the machine to achieve remote start stop and parameter reading

4. Corrosion resistant panel design, suitable for acidic and alkaline chemical environments in semiconductor workshops, resistant to chemical gas erosion

5. The overall structure is compact, easy to disassemble and maintain, and there is no need to make major changes to the wiring when replacing the EX-410 cycle unit

Product Parameters:

1. Material model: RX-610-T1-R

2. Temperature control accuracy: ± 0.1 ℃

3. Temperature measuring element: Pt100 platinum resistor

4. Communication interface: RS-232C

5. Compatible equipment: Komatsu Kelk EX-410 chemical cycler

Application fields:

1. Constant temperature circulation control of wet cleaning solution for semiconductor wafers

2. Etching process supporting chemical solution temperature regulation system

3. Linkage control of flow rate and temperature of wafer surface treatment tank solution

4. Constant temperature supply of chemical medium for precision wet process chamber

5. Replacement of old 200mm semiconductor production line cycle temperature control spare parts

This Komatsu RX-610-T1-R controller is the core control unit of the wet cleaning cycle unit, which stably controls the temperature of the chemical solution, ensures the consistency of the wafer process, and can quickly go online by checking the model of spare parts replacement.

Product imag

ontroller Module

531X303MCPARG1 F31X303MCPAPG100600 module
531X303MCPBBG1 F31X303MCPAPG100600 module
531X303MCPBDG1 F31X303MCPA00300 card

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