AMAT 0100-09251 multiplexer module

AMAT 0100-09251 multiplexer module 

 Introduction

#AMAT 0100-09251 multiplexer module

Product Features:

1. Adopting the Seriplex bus protocol, multiple signals are combined and transmitted to reduce the number of internal wiring in the machine

2. Integrated analog and digital signal acquisition, capable of synchronously reading signals from various sensors in the cavity

3. Onboard signal conditioning circuit, stable and reliable signal in strong electromagnetic environment of semiconductor workshop

4. Modular plug-in design, easy replacement of spare parts on site, no need to modify the original circuit

5. Factory aging screening, suitable for long-term continuous production conditions of 200mm wafer equipment

Product Parameters:

1. Material number: 0100-09251

2. Module model: SPX-MUXADIO-001

3. Communication type: Seriplex Sensorbus

4. Power supply specification: 12-24V DC

5. Compatible models: AMAT Centura, P-5000 series wafer equipment

Application fields:

1. Semiconductor etching chamber sensor signal collection and summary

2. Multi channel switching of pressure and temperature signals in thin film deposition equipment

3. Interlock signal transmission and distribution inside the wafer processing chamber

4. Multi channel pressure transmitter signal multiplexing for vacuum monitoring system

5. Expansion and renovation of I/O bus for old 200mm semiconductor equipment

This AMAT multiplexing module is the core signal acquisition spare part of the old Centura machine, used to centrally collect multiple sensor signals inside the cavity. When replacing spare parts, checking the model can quickly restore production line operation.

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