Komatsu HRX-604AH Network Heater Controller

Komatsu HRX-604AH Network Heater Controller 

 Introduction

Most colleagues who maintain Komatsu semiconductor equipment are familiar with the Komatsu HRX-604AH network heater controller, which is the temperature control main control unit of Komatsu semiconductor heat treatment equipment. It is responsible for closed-loop temperature control of multiple heating circuits and controls the process heating module through network and machine control communication.

Product Features

1. Multi channel independent temperature control, with individual temperature adjustments for each group of heaters, ensuring good consistency in process temperature

2. Stable network communication, capable of real-time interaction with the upper computer for temperature setting values and temperature measurement data collection

3. Built in multiple protections, overheating, wire breakage, and heater short circuit will trigger alarms and shut down

4. Anti dust and anti-static design, suitable for semiconductor clean room working conditions

5. Original interface matching, easy on-site disassembly and replacement, reducing production line downtime

Product Specifications

1. Compatible with Komatsu heat treatment/baking process equipment

2. Support multi-channel PT100 temperature signal acquisition

3. Communication method: industrial network+analog signal

4. Power supply AC100~240V wide voltage input

5. Working environment 5 ℃~40 ℃, suitable for dust-free workshops

Application Areas

1. Centralized control of Komatsu semiconductor baking equipment heaters

2. Temperature closed-loop control of wafer heat treatment process

3. Heating circuit adjustment of post lithography baking unit

4. Monitoring of heating module for thin film process matching

5. Maintenance and replacement of spare parts for Komatsu heat treatment equipment controllers

Overall, the Komatsu HRX-604AH network heater controller has strong multi-channel temperature control capabilities, supports remote network monitoring, and is often used for replacing temperature control faults in heat treatment units.

Product imag

ontroller Module

1C31197G05 Digital input module
1C31201G01 Analog input module
1C31227G02 analog output module

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