Varian E11604060 sport control chassis

Varian E11604060 sport control chassis 

 Introduction

Many colleagues who maintain Varian ion implantation machines have used the Varian E11604060 motion control chassis. It is a precision motion base that carries the wafer stage in ion implantation equipment, integrates servo drive and position feedback, and is responsible for high-precision wafer displacement and positioning. It is the core component of the machine motion system.

Product Features

1. Strong overall rigidity, small deformation during high-speed movement, ensuring repeated accuracy of wafer positioning

2. Clean grade mechanical design with low dust generation during operation, meeting the standards of semiconductor dust-free workshops

3. Integrated multi axis servo linkage, capable of synchronously completing translation and fine adjustment actions, suitable for doping process requirements

4. Equipped with position sensor closed-loop feedback, real-time correction of position deviation, reducing positioning deviation

5. Original complete set structure, matched with Varian ion implantation machine main control, easy to disassemble and replace on site

Product Specifications

1. Compatible equipment: Varian series ion implantation machine

2. Support multi axis composite precision motion, carrying wafer stage components

3. It has the ability to fine tune the position at the nanometer level, meeting the precision of ion implantation doping

4. Supporting multiple servo signal interfaces and position feedback channels

5. Working environment 5 ℃~40 ℃, suitable for clean workshop conditions

Application Areas

1. Motion support for wafer stage of Varian ion implantation machine

2. Precise positioning and scanning of wafer doping process

3. Calibration and adjustment of ion beam incidence position

4. Wafer stage servo motion unit matching

5. Maintenance and replacement of spare parts for Varian ion implantation machine

Overall, the Varian E11604060 motion control chassis has good rigidity and high positioning accuracy, and is often used for repairing and replacing motion faults in ion implantation aircraft.

Product imag

ontroller Module

1C31197G05 Digital input module
1C31201G01 Analog input module
1C31227G02 analog output module

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