NIKON KBB17351 Rotating Lens Assembly

NIKON KBB17351 Rotating Lens Assembly 

 Introduction

Many colleagues who maintain Nikon lithography machines have come into contact with the NIKON KBB17351 rotary lens component, which is a core spare part of the NSR series lithography machine optical unit. It adjusts the optical path through precise rotation, corrects exposure optical aberrations, and directly affects the accuracy of wafer pattern exposure.

Product Features

1. The optical lens has excellent coating, stable light transmission, and effectively reduces exposure light loss

2. The rotating mechanism has extremely high precision, and even small angle adjustments can complete optical path correction

3. Low particle design, no pollutants generated during operation, suitable for lithography clean workshops

4. Equipped with angle and position feedback, real-time feedback of rotation posture to the main control system of the machine

5. Original precision assembly, optical performance can be restored without complex debugging after replacement

Product Specifications

1. Compatible equipment: Nikon NSR series semiconductor lithography machine

2. Function: Optical path rotation adjustment, exposure aberration compensation

3. Precise rotary actuator with nanometer level precision for angle control

4. Optical lenses are resistant to UV aging and suitable for long-term exposure conditions

5. Working environment 5 ℃~24 ℃ constant temperature dust-free workshop

Application Areas

1. Nikon NSR lithography machine exposure optical system

2. Correction of optical path aberrations and fine-tuning of optical parameters in photolithography

3. Precision control of wafer lithography pattern exposure

4. Maintenance of lithography machine illumination light path unit

5. Nikon lithography machine optical spare parts maintenance and replacement

In general, the NIKON KBB17351 rotary lens component is a key component of the lithography machine optical system, with precise optical path adjustment and frequent maintenance and replacement of optical unit failures.

Product imag

ontroller Module

1C31197G05 Digital input module
1C31201G01 Analog input module
1C31227G02 analog output module

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