AE 3150017-026 RF Generator

AE 3150017-026 RF Generator 

 Introduction

AE 3150017-026 RF generator belongs to the RF30S series solid-state RF power supply, providing stable RF energy for semiconductor plasma processes.

Product Features:

1. Power closed-loop regulation, minimal plasma state fluctuations, and good batch process consistency

2. Built in arc suppression function, quickly extinguishing arcs and reducing wafer surface damage

3. Small rack mounted body, flexible installation layout inside the cabinet

4. Support remote signal reading and writing, convenient for machine integration monitoring

5. Built in multiple protection mechanisms, automatically cutting off RF output in case of abnormal load

Product Parameters:

6. Model: 3150017-026

7. RF type: RF30S solid-state RF generator

8. Rated output power: 3000W

9. Operating frequency: 13.56MHz

10. Heat dissipation method: air-cooled heat dissipation

Application fields:

11. Plasma power supply for semiconductor PVD sputtering coating

12. RF source for CVD thin film deposition equipment

13. Wafer plasma etching process

14. Flat panel display coating process

15. Replacement of spare parts for RF power supply in semiconductor production lines

Plasma coating equipment malfunction replacement, AE 3150017-026 RF generator adapted to the original equipment circuit

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