NSK 51161-802-001 Interface Robot

NSK 51161-802-001 Interface Robot 

 Introduction

NSK 51161-802-001 interface robot, semiconductor equipment wafer transfer manipulator, responsible for the picking and placing operations between the machine and the wafer box.

Product Features:

1. Dedicated structure for cleanroom, low particle generation, protecting wafer surface from contamination

2. Multi joint flexible movement, gentle wafer picking, reducing the risk of wafer breakage

3. Comes with a standard communication interface, which can quickly connect to the machine's main control system

4. Built in position feedback sensor, high repeatability accuracy

5. Lightweight arm design, fast start stop response, and shortened loading and unloading cycle time

Product Parameters:

6. Model: 51161-802-001

7. Working environment: Semiconductor Class1 clean environment

8. Load: Suitable for standard wafer carriers

9. Communication: Machine specific motion interface protocol

10. Structure: Multi joint vacuum suction robotic arm

Application fields:

11. Transfer operation from semiconductor wafer box to process chamber

12. Etching equipment for wafer loading and unloading transportation

13. Crystal Circle Handling on Thin Film Deposition Machine Platform

14. Automatic wafer picking and placing equipment for wafer inspection

15. Replacement of spare parts for NSK semiconductor transmission manipulator

Automated wafer loading and unloading production line maintenance, NSK 51161-802-001 interface robot adapts to the original machine communication circuit.

Product imag

ontroller Module

RELIANCE WR-D4004 MD-D4014B output module
BENTLY 132417-01 Monitor module
BENTLY 132419-01 Monitor module

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