Nikon 4T070-338-1 amplifier module

Nikon 4T070-338-1 amplifier module 

 Introduction

Nikon 4T070-338-1 (SPA494E) is the top servo amplifier module of Nikon NSR lithography machine RY-RU, responsible for driving the precision VCM voice coil motor corresponding to the exposure stage, ensuring dynamic positioning during scanning exposure.

1. High speed response of dynamic current loop, real-time fine-tuning of output torque during scanning exposure stage, and suppression of high-frequency micro vibration of the platform;

2. Equipped with a built-in signal sampling circuit, it continuously collects motor current and position deviation, and provides real-time feedback to the main control;

3. Multi layer shielding board design to isolate electromagnetic interference caused by laser and radio frequency inside the lithography machine;

4. Equipped with graded fault alarms, distinguishing different types of faults such as slight drift, overload, short circuit, etc., for easy maintenance;

5. Standard rack slot type board, supports hot swappable maintenance, shortens the downtime for lithography machine maintenance.

6. Supporting model SPA494E;

7. Drive type: Voice coil motor VCM;

8. Closed loop sampling: high-speed grating position feedback;

9. Power supply specification: DC48V;

10. Compatible models: NSR series stepper scanning lithography machine.

11. Drive the RY-RU axis voice coil motor on the top of the lithography machine worktable;

12. Dynamic attitude compensation control during scanning exposure process;

13. Quick correction of small displacement of the crystal cone;

14. Multi axis synchronous motion torque output during exposure period;

15. High precision scanning servo drive unit for lithography equipment.

This 4T070-338-1 directly affects the etching accuracy of scanning exposure and is a critical servo drive spare part in the lithography machine motion system.

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