AMAT 0010-37148 Double Spring C-Type Plug Assembly

AMAT 0010-37148 Double Spring C-Type Plug Assembly 

 Introduction

AMAT 0010-37142 double spring C-type plug component, spare parts for vacuum chamber sealing plugs.

1. Double spring structure, which can adaptively compensate for the gap between the sealing surfaces;

2. Corrosion resistant special material, resistant to plasma chamber environment;

3. Elastic compression design to maintain vacuum sealing performance;

4. Easy disassembly and assembly, quick insertion and replacement during maintenance;

5. Resistant to thermal deformation and stable sealing under temperature fluctuations in the cavity.

1. Type: Vacuum C-type sealing plug;

2. Built in dual spring compression mechanism;

3. Compatible with AMAT Centura series machines;

4. Function: Vacuum sealing of chamber ports;

5. Applicable environment: Plasma process vacuum chamber.

1. Sealing and sealing of semiconductor film cavity ports;

2. Vacuum isolation and sealing during cavity maintenance;

3. PVD etching chamber inspection, repair and sealing;

4. Sealing and isolation of process chamber interfaces;

5. Backup sealing components for vacuum chambers.

This 0010-37142 is a vacuum chamber sealing spare part, which directly affects the vacuum degree of the chamber.

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