Nikon 4S025-566 Printed Circuit Board

Nikon 4S025-566 Printed Circuit Board 

 Introduction

Nikon 4S025-566， Model IUDRV1-X8A driver PCB board, compatible with NSR-S620D immersion lithography machine, controls immersion system mechanism drive.

1. Output driving signals to control the action of the immersion unit actuator;

2. Equipped with signal shielding to suppress electromagnetic interference near the optical path;

3. Real time monitoring of load status, triggering alarms for abnormalities;

4. CPCI slot type board, easy to disassemble and maintain;

5. High speed data exchange with the main control board.

1. Nickname IUDRV1-X8A;

2. Compatible with NSR-S620D immersion lithography machine;

3. Board type driver PCB;

4. Bus CPCI;

5. Install in the cabinet slot.

1. Drive control of immersion unit mechanism in lithography machine;

2. Immersion matching execution component action output;

3. Drive the cavity fine-tuning mechanism;

4. Drive circuit status acquisition;

5. Immersion lithography equipment driver board.

This 4S025-566 is an immersion system driver board that ensures stable operation of the immersion components

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