NIKON 4S015-479 Compact Data Module

NIKON 4S015-479 Compact Data Module 

 Introduction

NIKON 4S015-479 is a compact data module for Nikon lithography machines, responsible for collecting, compressing, and transmitting internal detection data of equipment.

1. High speed collection of raw data from various sensors;

2. On board data compression to reduce bus transmission load;

3. Cache temporary process data to ensure continuous sampling;

4. Built in self-test, data abnormal output alarm;

5. Slot type board, easy to install and replace.

1. Compatible with NSR series stepper scanning lithography machines;

2. Board type: Compact data acquisition module;

3. Signal interface: dedicated internal high-speed bus;

4. Installation method: Cabinet CPCI slot;

5. The working temperature is 5-40 ℃.

1. Raw data acquisition of lithography machine sensors;

2. Check data compression and temporary caching;

3. The subsystem transmits measurement data to the main control;

4. Real time data forwarding during the exposure process;

5. Lithography equipment data acquisition unit.

This 4S015-479 is responsible for data collection and forwarding of lithography machines, ensuring stable uploading of various measurement data

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