Nikon 4S066-019-1 amplifier module

Nikon 4S066-019-1 amplifier module 

 Introduction

Nikon 4S066-019-1 is a servo amplifier module of Nikon's NSR series lithography machine, used to drive the worktable voice coil motor and ensure high-precision motion of the exposure platform.

1. High speed servo response, real-time correction of platform position deviation, meeting the nanometer level positioning requirements of photolithography;

2. Built in current closed-loop control, stable output torque, and suppression of motion jitter;

3. Integrated fault detection circuit, fast alarm protection platform and motherboard in case of overload or short circuit;

4. Standard card structure, compatible with internal slots of the machine, easy to disassemble and maintain;

5. Anti interference circuit design for stable operation in complex electromagnetic environments of lithography machines.

1. Drive type: Voice coil motor VCM servo drive;

2. Control mode: current/position dual closed loop;

3. Working voltage: DC24V;

4. Signal interface: differential encoder signal;

5. Compatible models: NSR iPadOS/S308/S610 series lithography machines;

1. XY axis voice coil motor drive for lithography machine workpiece stage;

2. Precise motion control of photolithography mask stage;

3. High precision positioning control during wafer exposure stage;

4. Synchronize the movement of the scanning lithography process platform;

5. Servo motion unit for semiconductor lithography equipment.

This 4S066-019-1 is the core motion board of Nikon scanning lithography machine, which directly affects the accuracy of exposure and etching, and is a key spare part in the equipment.

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