Kawasaki TS310A-D524S Wafer Handling Robot Group

Kawasaki TS310A-D524S Wafer Handling Robot Group 

 Introduction

Kawasaki TS310A-D524S is a Kawasaki TTS series wafer handling robot group, commonly used for silicon wafer transfer in EFEM clean environments.

1. Single arm telescopic structure, smooth movement, stable wafer loading and unloading, reducing fragment risk

2. Built in collision detection function, immediately stops when encountering foreign objects, protecting the wafer and arm

3. ISO1 level clean design, low dust emission, suitable for semiconductor dust-free workshops

4. Equipped with an absolute encoder, there is no need to reset to zero when starting up, which shortens the standby time of the machine

5. Compatible with SEMI specifications, with complete communication interfaces for easy integration with front-end devices

1. Maximum arm span 1180mm

2. Z-axis lifting stroke 470mm

3. Repeat positioning accuracy ± 0.05mm

4. The rotation angle of the base is 330 °

5. Cleanliness level ISO Class1

1. Wafer transfer between EFEM module FOUP and process chamber

2. Front end wafer loading and unloading operations of etching equipment

3. Automatic handling of silicon wafers by thin film deposition machine

4. Wafer measurement and optical inspection substrate transportation

5. Clean handling of semiconductor substrates and carrier rings

This TS310A-D524S has a fast response speed and compact structure, making it a common wafer handling unit in semiconductor front-end machines

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