Kawasaki 3NT420B-B029 Double Blade Wafer Conveyor Robot

Kawasaki 3NT420B-B029 Double Blade Wafer Conveyor Robot 

 Introduction

Kawasaki 3NT420B-B029 is a commonly used dual blade wafer transfer robot by Kawasaki, which operates alternately with two hands and is suitable for clean transfer inside EFEM.

1. Alternating the use of dual blades with both hands to enhance the speed of film transfer

2. High rigidity arm body, smooth operation, reduces the risk of wafer scratches

3. ISO1 level cleanliness standard, good dust control on the production line

4. Compact eccentric arm, no need for walking axis, saving internal space of the equipment

5. Built in security protection, compatible with SEMI standards, convenient for device integration

6. Maximum arm span 1226.6mm

7. Z-axis lifting stroke 400mm

8. Repetitive positioning accuracy ± 0.05mm

9. Rotate the base 340 °

10. Cleanliness level ISO Class 1

11. Transfer of wafer boxes and process cavities within the EFEM module

12. Lithography and etching equipment for wafer loading and unloading

13. Automatic feeding and discharging of thin film deposition equipment

14. Wafer inspection, measurement, substrate handling

15. Semiconductor substrate and carrier ring transport

This 3NT420B-B029 has good stability in semiconductor front-end equipment, and many wafer equipment integrations will choose it

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