Edwards SCU-A2203W1 Turbine Controller

Edwards SCU-A2203W1 Turbine Controller 

 Introduction

Edwards SCU-A2203W1 turbine controller, dedicated drive control unit for magnetic levitation turbo molecular pump.

Product Features:

1. Equipped with vibration reduction control, it suppresses pump body vibration and reduces machine micro vibration interference

2. Magnetic levitation rotor closed-loop control, smooth start stop, reduces rotor impact damage

3. Built in fault self check, capable of outputting pre maintenance reminder signals in advance

4. Modular whole machine, in-situ replacement, no need to modify vacuum pipelines

5. Adapt to the long-term continuous operation of the production line and withstand the working condition fluctuations caused by process gases

Product Parameters:

1. Match STP-A2203 series magnetic levitation turbo pump hardware interface

2. Real time collection of operating data such as speed, temperature, vibration, etc

3. Adapt to the working temperature environment inside the equipment cabinet

4. Support remote start stop control of the entire machine and can be connected to the device monitoring bus

5. Abnormal state output alarm code, convenient for quickly locating pump body faults

Application fields:

1. Semiconductor etching deposition equipment turbine molecular pump drive control

2. Control of high vacuum cavity turbopump matching for ion implantation machine

3. Replacement of spare parts for the old Edwards maglev turbo pump controller

4. Vacuum equipment renovation and maintenance supporting drive unit

5. Start stop and parameter calibration and debugging of turbo pump after cavity maintenance

Edwards SCU-A2203W1 directly controls the operating conditions of the turbopump rotor, and its operating status will affect the chamber vacuum degree and the overall process stability of the machine

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