Nikon NSR-S620D Single Board Computer

Nikon NSR-S620D Single Board Computer 

 Introduction

Nikon NSR-S620D single board computer, an embedded main control board for Nikon immersion lithography machine.

Product Features:

1. Industrial grade computing performance, fast response to exposure motion and image alignment tasks

2. Anti cabinet vibration and electromagnetic interference, long-term program operation is not easy to shut down

3. Integrated board design, in-situ plug and replace, no need to modify the wiring of the entire machine

4. Equipped with a hardware watchdog, it automatically resets when the system crashes, reducing the risk of unnecessary downtime on the production line

5. Adapt to real-time systems of lithography machines to ensure stable synchronization and scheduling of multiple tasks

Product Parameters:

1. Match the dedicated bus inside the lithography machine and exchange data with each submodule

2. Carrying exposure algorithm, platform motion logic operation processing

3. Tolerate internal temperature and vibration conditions of equipment cabinets

4. Local storage of process parameters, operation logs, and fault records

5. Fault output status information, convenient for repairing and locating software and hardware problems

Application fields:

1. NSR-S620D Lithography Machine Station Motion and Exposure Process Calculation Control

2. Photolithography alignment image data acquisition and preprocessing work

3. Instruction forwarding and data exchange between subsystems of the entire machine

4. Replacement of damaged spare parts for old single board computers in lithography machines

5. System parameter import and whole machine debugging after equipment overhaul

The Nikon NSR-S620D single board computer is responsible for the core logic operations of the entire machine, which directly affects the exposure capacity and etching accuracy of the lithography machine.

Product imag

ontroller Module

CI868K01-eA 3BSE048845R2 The processor module
PM864AK01-eA 3BSE018161R2 Control module
3BHB003154R0101 GVC707AE01 IGCT module

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