LAM 853-172610-003 output RF matching module

LAM 853-172610-003 output RF matching module 

 Introduction

LAM 853-172610-003 output RF matching module is the impedance matching component at the end of the RF link of the etching machine.

Product Features:

1. Low RF power transmission loss, efficient delivery of power to the process chamber

2. Quickly achieve impedance matching under load fluctuations and suppress reflected power

3. Resistant to plasma environment, resistant to process gas corrosion, long service life

4. The overall modular assembly can be directly disassembled and assembled on site without the need to disassemble internal components

5. Equipped with standing wave over limit protection, reducing damage to the RF source caused by reverse power

Product Parameters:

1. Adapt to the original RF interface and installation position of the pan forest etching equipment

2. Collect standing wave and phase data from the output end and provide feedback to the entire system

3. Adapt to the working temperature environment around the cabinet and cavity

4. Match the RF power level of the machine to meet the process power output requirements

5. Abnormal state output alarm signal, convenient for maintenance and troubleshooting

Application fields:

1. Impedance matching at the end of the RF circuit of LAM etching equipment

2. Adaptation of RF power transmission in plasma etching chamber

3. Semiconductor dry etching process RF link matching

4. Replacement of aging and damaged spare parts in the matching module of the production line

5. RF link debugging and verification after cavity maintenance and upkeep

LAM 853-172610-003 controls the impedance state at the end of the RF link, which directly affects the stability of the chamber plasma and the uniformity of etching.

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