ATH V14611B4 Turbomolecular Pump

ATH V14611B4 Turbomolecular Pump 

 Introduction

ATH V14611B4 magnetic levitation turbo molecular pump is a commonly used oil-free high vacuum pump in semiconductor equipment, mainly used for replacing machine spare parts.

5 product features:

1. Magnetic levitation non-contact bearings operate without oil, eliminating chamber oil pollution.

2. The turbine traction composite impeller can withstand high front-end pressure and has strong adaptability to working conditions.

3. Configure a purge gas interface that can resist some corrosive process gases.

4. Support multi-directional installation and flexible internal layout of the cabinet.

5. Built in status monitoring, automatic protection of the rotor in case of abnormalities, reducing the risk of damage.

5 product parameters:

1. Nitrogen pumping rate of 400L/s.

2. The maximum vacuum can reach 10 ⁻¹⁰ mbar.

3. Integrated driver, supporting RS232/485 communication docking devices.

4. Air cooled cooling, intake flange DN160.

5. The working environment temperature is 10-40 ℃.

5 application areas:

1. High vacuum main pumping spare parts for semiconductor etching equipment.

2. PVD and PECVD coating equipment vacuum unit.

3. High vacuum system for mass spectrometry and electron microscopy analysis instruments.

4. Vacuum pumping of ion beam processing equipment chamber.

5. Repair and replacement of old pumps in scientific research vacuum chambers.

Overall, ATH V14611B4 is a discontinued model, and most of the parts on the market are refurbished after disassembly. It is necessary to check the rotor status before putting it into process use.

Product imag

ontroller Module

AD908CC Communication cable
AD908JQ output cable
IC697BEM713 Gas turbine card

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