Brooks Automation 002-7090-05 Atmospheric Wafer Robot

Brooks Automation 002-7090-05 Atmospheric Wafer Robot 

 Introduction

Brooks Automation 002-7090-05 is an ATR-7 atmospheric wafer manipulator, commonly used for handling front-end modules of semiconductor equipment and for replacing machine spare parts.

5 product features:

1. Single arm structure in atmospheric environment, high cleanliness level, reduces wafer particle pollution during transportation.

2. Servo direct drive design, smooth movement, high positioning repeatability, and reduced debris risk.

3. Can be paired with different end effectors, suitable for vacuum suction, edge clamping, and various picking methods.

4. Equipped with collision detection, it stops immediately when encountering foreign objects, protecting the wafer and the robotic arm body.

5. Adapt to machine bus communication, can interface with equipment hosts, and achieve automatic loading and unloading processes.

5 product parameters:

1. Suitable for 200mm wafer handling.

2. The positioning repeatability accuracy is ± 25 μ m.

3. DC48V servo power supply, compatible with front-end module power supply of equipment.

4. Supports Ethernet, IO interface, and machine interaction.

5. Suitable for clean workshop working environment of 10-35 ℃.

5 application areas:

1. Semiconductor equipment EFEM front-end module wafer transfer.

2. Adhesive coating and development track machine for atmospheric wafer handling.

3. Automatic picking and placing of wafers between the wafer box and the process station.

4. Automated wafer loading and unloading unit for quantity detection equipment.

5. Replacement of faulty spare parts for old semiconductor equipment robotic arms.

Overall, Brooks Automation 002-7090-05 belongs to the category of atmospheric end specialized handling robots. There are many refurbished parts in the market, and accuracy verification should be done before installation to confirm compatibility with the machine software version.

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