0190-89644 Turbomolecular Pump

0190-89644 Turbomolecular Pump 

 Introduction

0190-89644 is a turbo molecular pump that is used in conjunction with AMAT equipment. It is commonly used for replacing spare parts in semiconductor process equipment and has stable vacuum performance.

5 product features:

1. Magnetic levitation bearing structure, oil-free design, to avoid oil contamination of the process chamber.

2. The impeller has undergone anti-corrosion treatment and can withstand some corrosive gases in the process.

3. Equipped with a built-in blowing air interface, reducing the accumulation of process by-products in the pump.

4. Built in speed and temperature monitoring, automatic protection against abnormalities, reducing rotor damage.

5. The whole machine has a compact structure and is compatible with the original installation position of the machine. It can be directly replaced.

5 product parameters:

1. The nitrogen pumping rate is about 300L/s.

2. The maximum high vacuum can reach the level of 10 ⁻⁹ mbar.

3. Integrated driver module, supporting device bus communication.

4. Air cooled heat dissipation, standard vacuum flange interface.

5. The working environment temperature is 10-40 ℃, suitable for clean workshops.

5 application areas:

1. Spare parts for high vacuum main pump of AMAT semiconductor etching equipment.

2. PVD thin film deposition equipment vacuum acquisition unit.

3. Vacuum pumping of wafer processing chamber.

4. Repair and replacement of old pumps in plasma process equipment.

5. Supporting project for dismantling and refurbishing semiconductor equipment.

Overall, 0190-89644 belongs to equipment specific spare parts, and the market mainly consists of disassembled and refurbished parts. Before being put into use, the rotor and bearing status need to be checked before being put into process use

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