TEL 5011-000186-11 photoresist pump

TEL 5011-000186-11 photoresist pump 

 Introduction

TEL 5011-000186-11 is a specialized photoresist transfer pump for coating and developing equipment, commonly used for replacement of spare parts in TEL Lithium machines, with high precision in drug delivery.

5 product features:

1. The liquid receiving area is made of high-purity fluorine material to reduce particle and metal ion precipitation and protect the wafer process.

2. Low pulsation output, stable photoresist discharge pressure, ensuring consistent coating film thickness.

3. The whole machine is compatible with the original machine interface and can be installed directly without changing the pipeline.

4. Equipped with pressure monitoring, abnormal pressure can trigger an alarm to avoid glue breakage and leakage faults.

5. The pump body has a compact structure, suitable for the narrow space of the machine's medicine cabinet, and is easy to maintain and disassemble.

5 product parameters:

1. Suitable for micro quantitative delivery of photoresist, supporting different viscosity photoresist media.

2. The internal DC24V power supply of the equipment is compatible with the power supply system of the machine cabinet.

3. Communicate with the internal bus of the machine and receive device instructions to provide feedback on the operating status.

4. Original pipeline connector, compatible with TEL machine's liquid medicine pipeline specifications.

5. The working environment temperature is 18-28 ℃, suitable for semiconductor ultra clean workshop conditions.

5 application areas:

1. TEL Lithium coating and developing machine photoresist supply spare parts.

2. Semiconductor wafer spin coating process drug delivery unit.

3. BARC bottom anti reflective coating drug delivery.

4. Replacement of pump body due to equipment malfunction in the previous photolithography process.

5. Repair of the liquid medicine system for the semiconductor production line Track machine.

Overall, TEL 5011-000186-11 belongs to the machine exclusive liquid pump, and there are many disassembled spare parts on the market. Before starting the machine, the pipeline should be cleaned and the part number and version should be checked before assembly.

Product imag

ontroller Module

AD908AE structure cable
AD908CC Communication cable
AD908JQ output cable

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