MKS 400996G-20 controller board

MKS 400996G-20 controller board

 Introduction

The MKS 400996G-20 controller board is compatible with semiconductor vacuum flow equipment, with precise control and stable operation.

1. High precision signal acquisition, small error in flow and pressure data detection

2. Multi channel control output, synchronized control of multiple gas path components

3. Built in isolation filter to isolate plasma electromagnetic interference

4. Standard communication interface, capable of interfacing with upper computer for parameter debugging

5. Multiple circuit protection to prevent overvoltage and short circuit from burning out the board

6. Industrial grade board, resistant to dust, oil stains, and not easily aged

7. Wide temperature working range, stable high and low temperature working conditions of the production line

8. Onboard fault indicator light, quickly locate circuit abnormalities

9. Stable data storage, process parameters are not easily lost

10. Standardized board size, easy to plug and replace cabinet

11. Seismic reinforcement lines, adapted for continuous vibration operation of equipment

12. Support online parameter tuning to reduce downtime for maintenance

13. Universal among MFC devices of the same series, with strong compatibility for replacement

14. Full electrical testing at the factory, high product consistency

15. Low power circuit, low heat generation during long-term operation

Overall, the MKS 400996G-20 controller board has high control accuracy and complete protection, making it a core supporting board for semiconductor gas flow control.

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