Novellus 02-252395-00 Digital Power Control System

Novellus 02-252395-00 Digital Power Control System

 Introduction

Novellus 02-252395-00 is a specialized digital power control system for thin film deposition equipment, with precise digital regulation that coordinates the power output and process power logic of each machine.

1. Fully digital PID control, with minimal power output fluctuations

2. Multiple power channels are independently controlled, and power supply in different zones does not interfere with each other

3. Digital filtering circuit to resist electromagnetic interference in clean rooms

4. Wide temperature stable operation, suitable for high and low temperature process environments of equipment

5. Gold plated communication terminal, long-term plug-in without contact offset

6. Millisecond level dynamic response, fast load changes, stable voltage and current

7. Built in fault self check, real-time alarm for overcurrent, overvoltage, and overheating

8. Reinforced plate structure to withstand continuous vibration conditions of the machine

9. Sealed dustproof and moisture-proof design, delaying internal circuit aging

10. Standard rack plug-in structure, easy maintenance and replacement

11. Multiple power protection, automatic cut-off of output in case of abnormalities to prevent burning out

12. Multiple sets of process parameter storage, one click switching of deposition formula

13. Digital communication bus, connected to the main control system of the whole machine

14. High energy conversion efficiency and low temperature rise during the operation of the whole machine

15. Original factory long-term aging test, supporting 7 × 24-hour uninterrupted work

Conclusion: The power control of Novellus 02-252395-00 is stable and reliable, and it is the core power control unit of Novellus thin film deposition equipment.

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