TEL PWM010-TPB1 power controller

TEL PWM010-TPB1 power controller

 Introduction

TEL PWM010-TPB1 power controller

Suitable for TEL etching and thin film deposition semiconductor equipment, using PWM pulse width modulation to accurately control cavity power output

High precision duty cycle regulation, minimal voltage and current output fluctuations, ensuring stable and unchanged process parameters

Built in multi-stage filtering circuit, outputs low ripple pure power supply, does not interfere with cavity sensing and detection signals

Power on soft start circuit, suppress instantaneous surge current, protect precision circuit board components in the cavity

Integrate four layers of hardware protection for overvoltage, overcurrent, short circuit, and overheating, quickly cut off output and alarm in case of faults

Multi layer metal shielding PCB structure, resistant to plasma RF and frequency converter electromagnetic interference

Clean grade low exhaust components, suitable for high-grade dust-free wafer production environment without impurity precipitation

Onboard real-time signal feedback channel, synchronously transmitting voltage and temperature operation data to the main control

Independent partitioned power circuit, single channel load failure will not cause the entire machine cavity to shut down

Optimize the layout of thermal conductive vias to achieve controllable temperature rise during long-term full load operation of power components

Standard gold finger direct insertion structure, quick insertion and removal of equipment cabinets, time-saving and convenient maintenance and replacement

Industrial wide temperature substrate, high and low temperature performance around the cavity without drift attenuation

Strengthen the PCB substrate and solder joints to prevent virtual soldering and detachment during equipment vibration and platform movement

The board surface is clearly marked with silk screen printing points, and troubleshooting can quickly locate the fault points of the circuit

Original factory whole machine power on aging detection, directly compatible with TEL semiconductor process equipment of the same series

TEL PWM010-TPB1 power controller has precise voltage regulation and complete protection, and is a dedicated power control spare part for semiconductor thin film and etching process chambers

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