TEL 5868-000002-V1 thyristor control unit
Introduction
TEL 5868-000002-V1 thyristor control unit product features
TEL 5868-000002-V1 is compatible with Tokyo Electronic Semiconductor Equipment and is responsible for precise adjustment of heating load power.
High precision phase-shift trigger control, fine tune thyristor conduction angle, and smoothly adjust output power
Contactless thyristor switch structure, no mechanical wear, fast start stop response speed
Built in real-time current and voltage acquisition, closed-loop dynamic correction output, strong temperature control consistency
Optoelectronic isolation control circuit, isolated from radio frequency interference, suitable for complex electromagnetic environments such as etching and deposition
Multiple hardware protection, automatic output cut-off for overcurrent, phase loss, overheating, and short circuit
Original factory exclusive communication bus, which can synchronize power and fault data with the main control of the whole machine
Power on automatic self check calibration trigger circuit to avoid power output offset
Compact integrated module, saving installation space inside the equipment control cabinet
Efficient heat dissipation structure, less prone to overheating and power reduction during long-term high-power operation
Slow start and slow shutdown function, reducing power grid impact and protecting heating components
Multi layer isolated PCB wiring, strong and weak electrical zoning, reducing signal crosstalk distortion
Non volatile storage retains power parameters, no need to re debug after power failure and restart
Standardized plug and unplug wiring terminals, separate disassembly and maintenance without the need for complete machine shutdown
Industrial grade reinforced power devices, capable of withstanding long-term vibration and stable operation of the production line
Native matching TEL wafer process equipment, can directly replace old units of the same specifications
TEL 5868-000002-V1 is the core power control component of semiconductor heating systems, ensuring stable and controllable process temperature.
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