Verity 3D80-000906-V6 Sensor

Verity 3D80-000906-V6  Sensor        

 Introduction

Verity 3D80-00906-V6 Sensor Product Features

Verity 3D80-000906-V6 is used for endpoint detection in semiconductor plasma etching processes, with stable and reliable optical detection.

High precision spectral acquisition, precise capture of plasma light signals to determine process endpoint

Low noise photosensitive chip, capable of stable recognition of weak light signals without deviation

Multi band spectral detection, suitable for various wafer processes such as thin film and etching

High speed signal sampling, real-time feedback of plasma state changes in the cavity

Fiber optic optical path design, isolating RF interference without affecting detection accuracy

Equipped with standard communication protocols, it can directly connect to the device master for real-time data transmission

Built in algorithm threshold adjustable, flexible adaptation to different thickness wafer processes

The whole machine is equipped with a constant temperature control module to prevent detection errors caused by temperature drift

Small integrated structure, suitable for narrow and clean installation space of machines

Multiple fault self check, automatic reporting of abnormal light path and signal to the alarm

Dustproof sealed shell, suitable for long-term use in semiconductor clean rooms

Signal photoelectric isolation to avoid mutual interference between high and low voltage circuits

Long life optical components that meet the continuous operation of 7 × 24 production lines

Support local caching of data for easy traceability and review of process data

Standardized plug-in interface, disassembly and maintenance without the need for complete machine shutdown

Verity 3D80-00906-V6 is a core optical inspection component for semiconductor equipment, ensuring process consistency.

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