INFICON SPC-953-G1 gas analyzer

INFICON SPC-953-G1 gas analyzer        

 Introduction

INFICON SPC-953-G1 Gas Analyzer Product Features

Introduction: INFICON SPC-953-G1 is a Transpector 2 series semiconductor specific residual gas analyzer (RGA) used for real-time monitoring of trace gas components in vacuum chambers.

Original factory Yingfukang quadrupole mass spectrometry detection, accurately identifying various residual gases in processes

Wide mass detection range, capable of capturing trace impurities and reaction by-products

High speed scanning acquisition, real-time feedback on changes in chamber gas concentration

Integrated compact body, suitable for semiconductor etching and coating vacuum chamber installation

Metal enclosed heat dissipation shell, shielding workshop electromagnetic radio frequency interference

High voltage internal circuit with safety lock, reliable protection for high-voltage operations

Support RS485/Ethernet communication, connect to the main control system of the device to upload data

Built in standard gas database, automatically matching and identifying gas types

Real time concentration threshold alarm, rapid warning of abnormal chamber contamination

Water cooled cooling structure, suitable for continuous working conditions of high temperature vacuum process

Front sensor interface, easy to disassemble and replace probe operation

Low ion source loss design, long maintenance cycle for long-term use

Multiple circuit protection, anti-static, overvoltage, short circuit damage to equipment

Specialized sealing structure for clean workshops, dustproof and moisture-proof, suitable for dust-free environments

Complete operation log storage for easy process traceability and troubleshooting

Conclusion: INFICON SPC-953-G1 has sensitive detection and stable data, making it the core analytical equipment for gas monitoring in semiconductor vacuum process chambers.

Product imag

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