AMAT 0190-B2950 Programmable DC Controller

AMAT 0190-B2950 Programmable DC Controller 

Product Details Introduction

AMAT 0190-B2950 is a DC control power supply specifically designed for semiconductor equipment, used for regulating the power supply of cavity electrostatic chucks.

1. Programmable adjustment of voltage and current, supporting constant voltage and current switching

2. Stable output voltage with small ripple, ensuring stable coating process

3. Can communicate with the host and remotely set various process parameters

4. Long term compensation design to reduce line voltage losses

5. Multiple protections for overvoltage, overcurrent, and overheating, automatic power-off in case of faults

6. Internally store multiple sets of process parameters and retain power-off data

7. Card insertion installation, convenient disassembly and replacement of cabinets

8. Air cooled heat dissipation, capable of continuous full load operation for a long time

9. Indicator lights display operation and fault status in different zones

10. Circuit board protective coating, corrosion-resistant and electromagnetic interference resistant

11. Reserve analog control interface with adjustable output for external signals

12. Original factory standard wiring, no need to change the wiring for connecting the cavity circuit

13. Built in watchdog, automatically reset in case of program abnormalities

14. Suitable for various process cavities such as coating and etching

15. Common replacement parts for equipment maintenance

AMAT 0190-B2950 is a key spare part for vacuum chamber electrical control system.

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