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Gasonics 90-27004 Hot Solution Module
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- Delivery date: stock
- The quality assurance period： 365 days
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Gasonics 90-27004 Hot Solution Module
Product Details Introduction
product name
Gasonics 90-27004 Hot Solution Module
Product application areas
Wet process auxiliary heating system
Used in Gasonics semiconductor processing equipment to heat chemical solutions during specific cleaning or chemical treatment processes, ensuring a constant process temperature.
Chemical temperature control supply
Control and maintain chemical solutions (such as debonding solution, deionized water, stripping solution, etc.) within the set temperature range to improve cleaning or etching efficiency.
Cleaning module before and after plasma treatment
Collaborate with the main processing chamber to optimize the overall process during the cleaning or residue removal steps before and after plasma treatment.
Temperature control and safety interlock function
Equipped with a temperature control unit and safety protection mechanism, it prevents the solution from overheating, dry burning, or temperature drift, improving the safety and stability of equipment operation.
Components of modular liquid supply system
Integrate with the supply, filtration, and circulation systems to form a complete thermochemical liquid management unit, facilitating modular maintenance of equipment structure.
Equipment maintenance and spare parts replacement
As an original module, it is used for replacing or upgrading existing systems, restoring the function of hot liquid supply, and maintaining process consistency.
Product imag
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