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Gasonics 90-2627 Temperature Monitor
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Gasonics 90-2627 Temperature Monitor
Product Details Introduction
product name
Gasonics 90-2627 Temperature Monitor
Product application areas
Temperature monitoring of semiconductor plasma processing equipment
Used to monitor the temperature of key components in plasma ashing and etching equipment, such as heating tables, chambers, and related sensors, to ensure that the process temperature is maintained within the set range.
Process safety protection system
By real-time temperature monitoring, equipment damage caused by overheating or abnormal temperature can be prevented, triggering alarms or interlocking protection to ensure the safety of equipment and operators.
Temperature data collection and feedback
Convert temperature signals into electrical signals and transmit them to the main control system or display unit for process parameter adjustment and equipment operation monitoring.
Components of automated temperature control system
Integrated into automatic adjustment systems such as gas flow rate and RF power, achieving closed-loop temperature control and improving process stability and yield.
Equipment maintenance and fault diagnosis
As one of the maintenance tools, it helps technicians quickly detect the cause of temperature abnormalities and assists in equipment fault location and repair.
Temperature monitoring of laboratory and R&D equipment
Applied to semiconductor equipment in the laboratory or research and development stage, providing precise temperature data to support process optimization.
Product imag
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ABB REG670 1MRK002826-AC 安全系统组件
| SC754A-001-01 | AMAT 0100-00080 | PFCL201C |
| SC753B-001-01 | AMAT 0100-01950 | 57360001-CY DSMB133 ABB |
| SC753A-005-01 | AMAT 0100-35180 | PFCL 201CE-10.0KN |
| SC753A-001-02 | AMAT 0100-14004 | 575 0001-ER DSTC190 ABB |
| SC753A-001-01 | AMAT 0100-35066 | 57160001-NF DSDO115 ABB |
| SC752B-001-01 | AMAT 0100-35117 | 26390582-CR DSTK132 ABB |
