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Gasonics 06764-005 Control Board
- Goods status： new/used
- Delivery date: stock
- The quality assurance period： 365 days
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Gasonics 06764-005 Control Board
Product Details Introduction
product name
Gasonics 06764-005 Control Board
Product application areas
Main control and collaboration of plasma de gluing/cleaning equipment
Coordinate and control the load-bearing system in Gasonics plasma processing equipment, manage process flow, state machines, and fault interlocks.
Wafer handling and mechanism control
Cooperate with the motor drive and pneumatic module to control the actions of the conveying arm, lifting platform, clamping/releasing, etc., ensuring the timing of loading and unloading and transportation.
Load lock and vacuum interlock control
Handle the logic of load lock prohibition, chamber pressure threshold, pumping and inflation sequence, etc., to ensure the vacuum environment and safety interlock.
Gas path/valve and process medium management
Drive solenoid valves, switch and feedback collection related to mass flow control, to achieve sequential control of gas feed, discharge and purging.
Temperature control and process monitoring interface
Collect heating table and chamber temperature and related sensor signals, and output control quantities to the upper or execution unit for constant temperature and over temperature protection.
RF/Power Subsystem Enabling and Protection
Enable/disable control and status monitoring of RF power supply, bias power supply, etc., and participate in interlock protection for overcurrent, overvoltage, overheating, etc.
I/O aggregation and upper computer communication
As an internal I/O aggregation node of the device, it completes data exchange with the human-machine interface/upper industrial control computer, supports alarm, event, and recipe execution feedback.
Maintenance and replacement upgrade scenarios
Used for spare parts replacement and fault repair of Aura series and other models; As a compatible control board in the renovation of old machines, restore the stability of equipment operation.
Product imag
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