Gasonics ABX-88919-41 Control Board

Gasonics ABX-88919-41 Control Board

Product Details Introduction

Product Name: Gasonics ABX-88919-41 Control Board

Component type: Main Control Board/Logic Controller

Main function: Responsible for the overall control logic of Gasonics plasma equipment, including process parameter management, signal processing, equipment status monitoring, and issuing execution instructions

1、 Equipment core control unit

This control board serves as the "brain" of the device, integrating signals from the operation panel, sensors, and actuators to achieve process automation.

Typical functions:

Process parameter setting and real-time adjustment

Control sub modules such as RF power supply, gas flow rate, vacuum system, etc

Monitor the safety interlock status and fault alarms

Communicate with the upper computer or Manufacturing Execution System (MES)

2、 Signal interface and data processing

The ABX-88919-41 control board integrates multiple digital and analog input/output interfaces, responsible for signal conversion and logic operations.

Interface type:

Digital Input/Output (DI/DO)

Analog Input/Output (AI/AO)

Communication interfaces (such as RS-232/RS-485, CAN, etc., depending on the specific device)

Relay driven output

3、 Automated execution of process flow

The control board coordinates the actions of various subsystems to ensure that the plasma process operates accurately according to the predetermined program.

Control object:

RF power module (such as AWD-D-1-0-023-010)

Gas flow controller (MFC)

Vacuum pump and valve control

Mechanical moving parts (lifting plate, load lock door)

Product imag

Related website links

AMAT 0190-66253 Communication Module

IC3600SVZB1 Computer Adjustmen

ASEA 57360001-AN circuit board

Other website links

GE VMIVME-017807-414001 直流信号输出模块

KOLLMORGEN S22460-SRS 伺服驱动器

AMAT 0190-26370 质量流量验证器