Gasonics 17547-01 Control Components

Gasonics 17547-01 Control Components

Product Details Introduction

Product Name: Gasonics 17547-01 Control Component

Component type: Integrated Control Assembly Module

Main function: Undertake some core control tasks in Gasonics plasma cleaning equipment, such as process management, signal distribution, actuator driving, and status monitoring

1、 Process control unit of plasma cleaning equipment

This control component is widely used in plasma ashing equipment such as Gasonics Aura, L3510, AE series, etc., as a key module in the process control system.

Typical use:

Control process parameters such as plasma processing time, gas on/off, power regulation, etc

Receive control commands from the host or operation panel

Send control signals to downstream actuators (solenoid valves, lifting platforms, RF power supplies)

2、 Signal integration and interface conversion module

The 17547-01 control component is often used as a signal bridge between multiple subsystems in a system, responsible for integrating and distributing different signal standards (analog, digital, TTL).

Applicable scenarios:

Convert sensor/encoder signals into control commands

Realize data synchronization between PLC and mechanical subsystem

Connect device diagnosis and fault protection circuit (such as interlock system)

3、 Actuator driver and feedback logic processing

This component integrates control logic for driving stepper motors, relays, pneumatic components, and other devices, and monitors and judges their feedback status in real time.

The controlled objects may include:

Load lock lifting plate (such as A90-029-03)

Stepper driver (such as RD-323M10)

Chamber gate valve, gas flow controller (MFC)

Cooling water/temperature control circuit start relay

Product imag

Related website links

FOXBORO FBM217 Voltage Monitor Module 

HONEYWELL 05704-A-0146 Digital

1TGE120011R1111 Controller Module

Other website links

GE TB43225AF14 断路器

GE DS3820PSCB1C1B电源模块

GE PIB671-1500 电源接口板