Gasonics 95-0203-03 power module

Gasonics 95-0203-03 power module

Product Details Introduction

Product Name: Gasonics 95-0203-03 Power Module

Functional positioning: The core component that provides stable voltage and current supply for plasma processing systems

1、 Gasonics plasma ashing/cleaning equipment power supply system

This module is widely used in Gasonics' plasma cleaning equipment such as Aura, L3500, and PEP series, to provide the required voltage, current, and signal isolation for the entire machine or a critical subsystem.

Typical functions:

Provide power to the control logic board, sensors, and actuators

Stabilize RF or DC circuit loads in the processing chamber

Provide different voltage outputs (such as ± 15V, 5V, 24V, etc.) for system daughter board use

2、 Power support unit in vacuum processing system

This power module is used to support the normal operation of multiple electric components in the vacuum chamber, such as load lock elevators, vacuum pump interfaces, and valve controls.

Applicable system components:

Wafer Elevator

Load Lock Valve

Process Chamber I/O Interface Control Board

Power input terminal of safety interlock module

3、 The power core of Gasonics control system

The power module is the basic support of the entire control board group, ensuring the voltage stability of the CPU main control board, I/O board, and display/monitoring module.

Related control module power supply objects:

Main control CPU control board

Plasma chamber gas flow control board

Temperature/pressure feedback sensor

System safety alarm device and relay module

Product imag

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