Gasonics GL139 Microwave Generator

Gasonics GL139 Microwave Generator

Product Details Introduction

product overview

Gasonics GL139 is an industrial grade microwave power generation module designed specifically for plasma process equipment. Its main task is to provide stable and continuous high-frequency microwave power for the plasma reaction chamber to excite and maintain the plasma environment. This model is widely used in plasma cleaning and stripping equipment such as Gasonics L3500 and L3510.

Technical characteristics (typical)

Output power: approximately 1250 watts

Supply voltage: 190-240 VAC

Cooling method: Water cooling

Matching magnetron model: GL130 or equivalent model

Installation location: microwave compartment area at the back or bottom of the device, connected to the waveguide transmission path

application area 

Semiconductor wafer plasma cleaning

Applied to processes such as photoresist removal, surface pretreatment, and particle removal.

By stabilizing microwave excitation, plasma uniformity and processing efficiency can be improved.

Plasma de gelation (ashing) process

In the de etching step after photolithography, oxygen plasma is maintained as an energy source to decompose organic matter on the wafer surface.

Support high-capacity continuous batch processing.

Laboratory and Process Development

Used for developing new microwave excitation parameters or optimizing cleaning processes in research and development environments.

Suitable for microwave excitation experiments under different gas conditions and chamber configurations.

Equipment maintenance and replacement

Can be used as a substitute for original microwave power supplies for maintenance or system upgrades of Aura, L series and other equipment.

Product imag

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